Scanning Electron Microscope

Device
SUPRA 40 VP
Device class
Electron microscope
Manufacturer
ZEISS
Application
  • High resolution microscopy
  • Structure and element analysis of ready-prepared surfaces and cross-sections
  • Characterisation of crystal structure
Properties
  • Gemini® tube with Schottky emitter
  • Variable Pressure option to investigate non-conducting specimen without previous metallisation
  • Maximum resolution:
    • 1,3 nm @ 15 kV acceleration voltage
    • 2,1 nm @ 1 kV
    • 5,0 nm @ 0,2 kV
  • Magnification 12…900.000x
  • Acceleration voltage 0,1…30 kV
  • Measurement current 4 pA…20 nA
  • Detectors:
    • In-Lens detector
    • Everhart-Thornley-SE detector
    • VPSE detector
  • Special features
    • EDX
    • EBSD
Examples
Damaged adhesive layer after shearing
NiAu finish on PCB
Structured Carbon Nano Tubes (CNT) on silicon
Solder joint of a passive component with intermetallic growth at the interfaces
Sawed PZT ceramic, columns 55 x 55 x 525 µm³
EDX of a gold bond wire