3D Profilometer

Typ
µScan AF2000
Geräteklasse
Geometrical Measurement
Hersteller
NanoFocus
Anwendung
  • Optical 3D scanning profiles using different sensors
    • Autofocus sensor
    • Confocal sensor
    • Chromatical sensor
    • Holografic sensor
  • Measurement of topography, surface profile or layer thickness
Eigenschaften
  • Measurement area 150 mm x 200 mm
  • Measurement area in height between 1000 μm and 18 mm
  • Height resolution down to 25 nm
  • Automatical measurements possible