3D Profilometer
Typ
µScan AF2000
Geräteklasse
Geometrical Measurement
Hersteller
NanoFocus
Anwendung
- Optical 3D scanning profiles using different sensors
- Autofocus sensor
- Confocal sensor
- Chromatical sensor
- Holografic sensor
- Measurement of topography, surface profile or layer thickness
Eigenschaften
- Measurement area 150 mm x 200 mm
- Measurement area in height between 1000 μm and 18 mm
- Height resolution down to 25 nm
- Automatical measurements possible