3D Profilometer

Device
µScan AF2000
Device class
Geometrical Measurement
Manufacturer
NanoFocus
Application
  • Optical 3D scanning profiles using different sensors
    • Autofocus sensor
    • Confocal sensor
    • Chromatical sensor
    • Holografic sensor
  • Measurement of topography, surface profile or layer thickness
Properties
  • Measurement area 150 mm x 200 mm
  • Measurement area in height between 1000 μm and 18 mm
  • Height resolution down to 25 nm
  • Automatical measurements possible