3D Topomety
Device
µSurf
Device class
Geometrical Measurement
Manufacturer
NanoFocus
Application
- Confocal microscopy using multi-pinhole technology
- High rsolution area measurement within seconds
- Measurement of topography, surface profile and layer thickness
Properties
- Measurement area up to 50 mm x 50 mm
- Height measurement area between 1 μm and 10 mm
- Height resolution down to 1 nm