3D Topomety

Typ
µSurf
Geräteklasse
Geometrical Measurement
Hersteller
NanoFocus
Anwendung
  • Confocal microscopy using multi-pinhole technology
  • High rsolution area measurement within seconds
  • Measurement of topography, surface profile and layer thickness
Eigenschaften
  • Measurement area up to 50 mm x 50 mm
  • Height measurement area between 1 μm and 10 mm
  • Height resolution down to 1 nm