Computed tomography
Device
nanotom
Device class
X-ray equipment
Manufacturer
GE Sensing & Inspection Technologies GmbH
Application
- Volume analysis and reconstruction of components and parts of modules
Properties
- Open nanofocus tube with diamond target
- Acceleration voltage: 10 – 180kV / 15W
- Beam current: 5 – 1.000µA
- Precision manipulator on a granite basis
- High resolution digital detector with 2.400 x 2.400 pixel, 12 Bit
- Pixel size: 50µm x 50µm
- Min. voxel size: < (500nm x 500nm x 500nm)
- Geometrical magnification: 1,7x…1.000x
- Max. specimen size / weight: h = 150mm, d = 120mm, m = 1kg
Examples
Complete model of a USB memory stick
QFN with thermal vias
Solder joint of an 0201
BGA balls with poor connection to the substrate
Virtual cross-section through 0201 solder joint
